Features
The vacuum control units are all integrated in one control box.
The independent evaporation current controller is used for convenient and quick operation.
The vacuum chamber is equipped with a KF40 side pump valve (directly connected to the foreline mechanical pump, which facilitates quick sample access and improves efficiency), a CF150 gate, valve (directly connected to the molecular pump), and a KF16 flange (Installation resistance gauge), 5 CF35 flanges (1 installation ionization gauge, 4 spare, easy to install other equipment).
There are 5 water-cooled electrodes at the bottom of the cavity, which can support 4 evaporation heating boats.
There are independent movable baffles above the four evaporation heating boats, which effectively avoid mutual pollution during evaporation.
The sample stage is mounted on the top of the cavity.
The cavity can be equipped with a high-resolution thin-film thickness gauge with an accuracy of 10Å.
Can use circulating water cooler.
| Technical Parameters | |
| installation condition | This equipment is required to be used at an altitude below 1000m, temperature 25 ℃ ± 15 ℃, humidity 55% Rh ± 10% Rh. |
| H2O | The equipment is equipped with a self-circulating cooling water machine (filled with purified water or deionized water) |
| Electricity | AC220V 50Hz，Must be well grounded |
| Gas | The chamber of the equipment needs to be filled with argon (purity 99.99% or more). You need to bring your own argon gas bottle (with Ø6mm double ferrule connector) and pressure reducing valve. |
| Platform | · Floor type, covering an area of more than 2m2 |
| Ventilation | Need |
| Input | Simplex AC220V，50Hz/60Hz，power |
| Evaporation output | Voltage AC0-8VContinuously adjustable, maximum evaporation current 200A, maximum evaporation power |
| Vacuum chamber | Ø300mm（inside diameter）×400mm，Stainless steel, inner wall electropolished alt=1 v:shapes=”_x0000_i1027″> |
| Cavity door | Ø200mm |
| Observation window | Ø95mm，Sealed with a special seal |
| Vacuum pump | High pumping speed turbo molecular pump, pumping speed 600L/s |
| Degree of vacuum | 5.0×10-6torr（40 minutes after the pump is turned on） |
| Ultimate vacuum | 5.0×10-7torr（Heating temperature is 100 ℃ -150 ℃) |
| Leak rate | 5.0×10-7Pa/s |
| Sample stage | Ø140mm |
| istance between evaporation and sample stage | 260mm |
| Cooling water demand | 15L/min |
| Size | 650mm×1200mm×1600mm; 25.6 inch x 47.2 inch x 63 inch |
| Weight | 600kg |
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