Existing vacuum coating equipment is used in a vacuum environment. A resistance heating evaporation source is used to vapor-deposit a metal film on a workpiece (such as a car lamp reflection plate), and plasma bombardment is used to clean the workpiece and deposit a superposition protective film. The workpiece is vapor-deposited with a traditional coating machine. Due to the large volume of the vacuum box, the workpiece must be accumulated in a certain amount before being placed in the vacuum box for vapor deposition. Therefore, the workpiece is exposed to the atmosphere for a long time, it will absorb a large amount of water and gas, which will lengthen the evacuation time, and the air will pollute the surface of the workpiece, and it will also cause logistics backlog.
The purpose is to provide a vacuum coating equipment with high coating efficiency and a glove box vapor deposition integrated machine. Working principle: This system is integrated by a vacuum coating system and a glove box system, which can complete thin film evaporation in a high vacuum evaporation chamber, and store, prepare and vaporize samples in a high purity inert gas atmosphere in the glove box.
After sample detection.
The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.
The new vacuum coating equipment has a short time required to reach the required vacuum degree in the working state, which shortens the time required for a work cycle. It can be matched with upstream equipment to form a one-to-one assembly line production, reducing the exposure time of the workpiece to the atmosphere. Reduce air pollution to the workpiece, shorten the vacuum time, and improve product quality.
