1. Turn off the loop and analyzer at the same time
Reasons: ①The pressure in the chamber is too high for an instant, exceeding +12mbar, the system will automatically protect; ②The voltage is unstable, causing system protection.
Method: ①Check whether the pressure setting is correct, whether the pressure sensor is abnormal, whether the vacuum valve or the air supply valve of the cabinet is damaged, and the pressure returns to normal, then turn on the analyzer and cycle. ②Check if the vacuum pump is broken and unable to operate.
2. The main antechamber and mini antechamber cannot replenish air
Reason: ①The air holes in the glove box leading to the main antechamber and mini antechamber may be blocked by plastic film, etc.; ②Whether the solenoid valve is not opened.
Methods: ①According to the direction of the pipeline, determine the position of the air hole and clear the pipeline; ②Check the wiring and solenoid valve.
3. The main antechamber and mini antechamber cannot be pumped out
Reasons: ①The air extraction holes in the main antechamber and mini antechamber are blocked by plastic film, etc. or the chamber door leaks; ②The antechamber door is not closed tightly, or the sealing ring of the main antechamber and mini antechamber is loose.
Method: ①Determine the position of the air hole according to the direction of the pipeline, and unblock the pipeline; ②Close the antechamber door and check the size of the sealing ring; ③Check whether the working air pressure is too low (because the main antechamber exhaust valve is a pneumatic valve).
4. The tank pressure continues to increase during purging
Reason: The purging valve is not opened, the intake pressure is too high, and the pipeline is not unblocked.
Method: ①Ensure the pipeline is unobstructed, preferably not to be bent; ②When purging, the relative pressure in the tank is continuously lower than 0.5 mbar.
5. Failure of the main valve of the purification column
Reason: ①The working gas pressure is less than 0.5Mpa; ②The main valve signal feedback failure.
Method: ①Replace the working gas cylinder, or check that the pressure of the auxiliary gauge of the pressure reducing valve is at 0.5Mpa; ②Check the signal switch of the main valve.
6. The loop cannot be turned on
Reason: low pressure or high pressure protection of the fan inverter.
Method: After the voltage stabilizes, shut down and restart after 1 minute.
