ATTO10-R High Vacuum Resistance Thermal Evaporation Coating Machine

Description
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Why Choose Us

Atto10 is a proven, robust and versatile design standard solution. The system can be operated manually and automatically and has a wide range of deposition instrument options including: electron beam evaporators, RF and DC sputtering sources, low temperature organic evaporators and metal evaporators. There are also many system options available, such as quartz crystal monitoring, high vacuum load lock and heating, cooling, rotating or static sample stage.

The system has high vacuum pressure and evacuation time tests. Industry software control systems with advanced programming capabilities, system flexibility, they can be configured as sputtering systems, electron beam systems, OLED systems, thermal evaporation systems or any combination of these processes. A variety of optical and spectroscopic techniques can be integrated and the system integrated into a research glove box that requires an inert atmosphere.

Features

Multi-station glove box purification protection system

Water oxygen content

Germany Baode solenoid valve modular design, excellent sealing performance

European process requirements

Wide pressure range to 10 -9 Torr

Low exhaust

Excellent film uniformity and deposition rate

Efficient sputtering target utilization

Excellent target management mechanism eliminates the need for thermal paste, management staff, etc.

Compact, modular magnet array

Magnet is not exposed to vacuum, magnet is not exposed to cooling water

During target replacement, the cooling water will not be exposed to the vacuum chamber

Unbalanced operation and compatibility with magnetic materials are available

Full range of accessories (ventilation, chimneys, shutters, cluster arrays, etc.)

Custom sputtering source configuration available

Applications

In the semiconductor industry, MOCVD technology, microelectronic semiconductors, OLED / PLED development and production, lithium ion battery development and production, nanomaterial research, catalyst research, and research and development of perovskite solar cells

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Why Choose Us

When you select Etelux Solutions as your technology provider, you'll be placing your Glovebox& Vacuum Coating Equipment infrastructure in the hands of experienced, trained professionals. We take a different approach and the results are clear. People love our team and the services we provide.

Rich Glove Box Experience

We have more than 16 years of glove box manufacturing experience and have been awarded 35 technical patents.

Strong Research & Development Team

Our R & D team is committed to innovative technology. Through comprehensive international technical exchange & collaboration and through continuous application of cutting edge engineering and manufacturing techniques we create “state-of-the-art” products and customized solutions to serve the diverse needs of our client base.

Strict Quality Control Standards

We have deployed an ERP system that vigorously and systematically controls, tracks, and monitors the fulfilment process from placement of an order through design, manufacture delivery, installation & commissioning, and post-sale service.

Advanced Production Equipment

Gantry Machining Centers, CNC Turning Centers, Welding Robots, CNC Press Brake, Laser Cutting Machine and Helium Mass Spectrometer leak detection are among the equipment we use every day to produce our glove boxes. These facilities and equipment not only ensure the consistency of the products, but they also enable us to shorten the prototyping cycle of new product R & D and product customization.

Client Service

The key to our client service is our seamless integration of deep industry and functional expertise with tools and capabilities to support execution and make change happen—on a global scale.