The homogenizer has a wide speed range and high speed accuracy; the temperature of the hot glue baking plate is controlled accurately and the temperature field is evenly distributed. It is widely used in photoresist coating and baking in semiconductor process and thin film process.
The multi-functional glue-gluing and baking machine can carry out two processes of glue-gluing and glue-baking. The speed range of the homogenizer in this equipment: 1-12000 rpm, which can rotate clockwise and counterclockwise; the setting accuracy of the time for setting the homogenizer: 0.1 sec; the accuracy of the speed adjustment
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