The vacuum coating machine is mainly used to coat some ordinary glass with less outgassing. Due to the large outgassing of large-area plexiglass, low thermal deformation temperature and low rigidity, the existing vacuum coating machine cannot coat large-area plexiglass.
The existing coating machine has a square distribution among the evaporation sources, so the uniformity of the coating layer is poor, and it cannot be guaranteed that the large-area organic glass will not be deformed during the plating process. In order to overcome the shortcomings of the existing technology, a vacuum coating system is provided. This system is integrated by a vacuum coating system and a vacuum glove box system. It can complete film evaporation in a high vacuum evaporation chamber and high purity in the glove box. Sample storage, preparation and detection of samples after evaporation under inert gas atmosphere.
The combination of evaporation coating and vacuum glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environmental atmosphere system, eliminating the organic large-area circuit preparation process The influence of unstable factors in the mid-atmosphere environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits. Application of vacuum coating system: mainly used for experimental research and application of solar cells perovskite, OLED and PLED, semiconductor preparation, etc.
