In the field of coating, the thickness of the film sample after coating is an important factor affecting the performance of the film. Therefore, when evaluating the performance of a film sample, it is necessary to test the performance of the film sample under different thicknesses. In the case of vacuum coating, this often requires multiple sample preparations.
However, there are two problems in preparing samples for multiple times: firstly, the state of the instrument is different for the samples grown in different times, so that the factor that affects the performance of the film sample may not only be the thickness; secondly, the sample needs to be vacuumed again in the vacuum coating experiment. Obtaining is very time-consuming. Increase the cost of production and testing.
Therefore, it is necessary to provide a device that can grow thin films of different thicknesses on the same substrate to solve the deficiencies of the prior art. In view of this, a vacuum coating machine (glovebox evaporation integrated machine) is provided, which can grow a series of films with different thicknesses on the same substrate, ensuring the consistency of the growth state of films with different thicknesses.
The glove box evaporation integrated machine is composed of a vacuum coating system and a glove box system. It can complete film evaporation in a high vacuum evaporation chamber, and store, prepare and evaporate samples in a glove box with high purity inert gas atmosphere. Inspection of samples after plating.
The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete system with a controllable environment atmosphere, eliminating the organic large-area circuit preparation process. The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.
