With the advocacy of energy conservation and emission reduction policies, people have put forward higher requirements for low-emissivity coated glass. The products produced by the coating section commonly used to produce coated glass can no longer meet the higher requirements put forward by people. The large-area magnetron sputtering coating production line includes many components, of which the core area is the process layout of the coating high vacuum area, that is, the coating section.
In the prior art, there are problems such as complex installation of the coating unit, poor flexibility, low isolation coefficient, poor vacuum environment, and low cooling efficiency. Poor vacuum environment and low cooling effect will seriously affect the quality of the prepared film layer.
Provide a vacuum coating system. This system is a combination of a vacuum coating system and a glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber, and store samples in a high purity inert gas atmosphere in the glove box.
Preparation and testing of samples after evaporation
The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.
The vacuum coating system is used to solve the problems of complex installation, poor flexibility, low isolation coefficient, poor vacuum environment, and low cooling efficiency in the prior art.
