With the advocacy of energy conservation and emission reduction policies, people have put forward higher requirements for low-emissivity coated glass. The products produced by the coating section commonly used to produce coated glass can no longer meet the higher requirements put forward by people. The large-area magnetron sputtering coating production line includes many components, of which the core area is the process layout of the coating high vacuum area, that is, the coating section. The poor vacuum environment and low cooling effect in the prior art will seriously affect the quality of the prepared film layer.
Provide a vacuum coating system. This system is a combination of a vacuum coating system and a vacuum glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber and store samples in a high purity inert gas atmosphere in the glove box. , Preparation and detection of samples after evaporation. The combination of evaporation coating and vacuum glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire thin film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation process The influence of unstable factors in the atmospheric environment ensures the production of high-performance, large-area organic optoelectronic devices and circuits.
Vacuum coating system is mainly used for experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation and so on.
