During the manufacturing process of the OLED display panel, a vacuum vapor deposition of the organic film layer is required on the glass substrate, which requires the completion of the vacuum vapor deposition machine. Therefore, a glove box is provided, and the system is integrated by a vacuum coating system and a vacuum glove box system, and the film vapor deposition can be completed in a high vacuum vapor deposition chamber, and a high purity inert gas atmosphere in a glove box. The sample was carried out, prepared, and the detection of the vapor deposition sample.
Vacuum coating system advantages: Evaporation coating and glove box combination, realization of process full enclosure of vapor deposition, package, test, so that the entire film growth and device preparation process is highly integrated into a complete controlled environmental atmosphere, eliminate organic big Influence of unstable factors in the atmospheric environment during the preparation of area circuits, guarantees high performance, large-scale organic optoelectronic components and circuitry.
The vacuum coating system is mainly used in the experimental study and application of perovskite, OLED and PLED, semiconductor preparation.
